Micro-additive manufacturing technologies of three-dimensional MEMS

Journal article

Hassanin, H., Sheikholeslami, G., Pooya, S. and Ishaq, R. 2021. Micro-additive manufacturing technologies of three-dimensional MEMS . Advanced Engineering Materials. https://doi.org/10.1002/adem.202100422
AuthorsHassanin, H., Sheikholeslami, G., Pooya, S. and Ishaq, R.
Abstract

Conventional microfabrication processes have been well established, but their capabilities are generally limited simple and 2D extruded geometries. Additive manufacturing allows the ability to manufacture true 3D complex geometries, rapid design for manufacturing, mass customisation, materials savings, and high precision which have triggered the increased interest in manufacturing microelectromechanical systems (MEMS). This paper consolidates MEMS manufacturing's recent advancements, including both conventional and additive manufacturing technologies, their working principles, and practical capabilities. The paper also discusses in detail the use of additive manufacturing in several MEMS areas such as in microelectronics, circuitry, microfluidics, lab on a chip, packaging, and structural MEMS. Furthermore, the potentials and limitations of additive manufacturing are investigated with regards to the MEMS requirements. Finally, the technology outlook and improvements are discussed. This study showed that additive manufacturing has offered a promising future for the fabrication of microelectromechanical systems, especially using high resolution techniques such as microstereolithography, materials jetting, and materials extrusion. On the other hand, current challenges such as materials requirements, equipment innovation, fabricating of in vivo devices for biomedical applications, inherited defects and poor surface finish, adhesion to substrates, and productivity are areas that requires further study to increase the uptake by the MEMS community.

KeywordsAdditive manufacturing; MEMs; 3D printing; Microfabrication; Rapid prototyping
Year2021
JournalAdvanced Engineering Materials
PublisherWiley
ISSN1438-1656
1527-2648
Digital Object Identifier (DOI)https://doi.org/10.1002/adem.202100422
Official URLhttps://doi.org/10.1002/adem.202100422
Publication dates
Online06 Sep 2021
Publication process dates
Accepted16 Aug 2021
Deposited13 Sep 2021
Accepted author manuscript
File Access Level
Open
Output statusPublished
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